发明授权
- 专利标题: Multiple-gate transistors formed on bulk substrates
- 专利标题(中): 形成在大量衬底上的多栅极晶体管
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申请号: US11645419申请日: 2006-12-26
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公开(公告)号: US07863674B2公开(公告)日: 2011-01-04
- 发明人: Yee-Chia Yeo , Fu-Liang Yang , Chenming Hu
- 申请人: Yee-Chia Yeo , Fu-Liang Yang , Chenming Hu
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: H01L31/062
- IPC分类号: H01L31/062
摘要:
In one aspect, the present invention teaches a multiple-gate transistor 130 that includes a semiconductor fin 134 formed in a portion of a bulk semiconductor substrate 132. A gate dielectric 144 overlies a portion of the semiconductor fin 134 and a gate electrode 146 overlies the gate dielectric 144. A source region 138 and a drain region 140 are formed in the semiconductor fin 134 oppositely adjacent the gate electrode 144. In the preferred embodiment, the bottom surface 150 of the gate electrode 146 is lower than either the source-substrate junction 154 or the drain-substrate junction 152.
公开/授权文献
- US20070102763A1 Multiple-gate transistors formed on bulk substrates 公开/授权日:2007-05-10
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