Invention Grant
US07864298B2 Stage apparatus and exposure apparatus with heating-and-cooling unit to change shape of mirror
失效
具有加热和冷却单元的舞台装置和曝光装置以改变镜子的形状
- Patent Title: Stage apparatus and exposure apparatus with heating-and-cooling unit to change shape of mirror
- Patent Title (中): 具有加热和冷却单元的舞台装置和曝光装置以改变镜子的形状
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Application No.: US11411295Application Date: 2006-04-25
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Publication No.: US07864298B2Publication Date: 2011-01-04
- Inventor: Hirokazu Sekine
- Applicant: Hirokazu Sekine
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JP2005-141030 20050513
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G02B7/182
Abstract:
At least one exemplary embodiment is directed to a stage apparatus which comprises a movable stage, a mirror for reflecting light from an interferometer to measure the position of the stage, a heating-and cooling unit for heating or cooling the mirror, and a calculator for calculating the shape of the mirror. The shape of the mirror can be changed by controlling the heating-and-cooling unit according to the shape of the mirror obtained from the calculator.
Public/Granted literature
- US20060262308A1 Stage apparatus and exposure apparatus Public/Granted day:2006-11-23
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