发明授权
- 专利标题: Spin head and substrate treating method using the same
- 专利标题(中): 旋转头和使用其的底物处理方法
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申请号: US11896144申请日: 2007-08-30
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公开(公告)号: US07866058B2公开(公告)日: 2011-01-11
- 发明人: Hyun Jong Kim , Ju Won Kim , Jung Keun Cho
- 申请人: Hyun Jong Kim , Ju Won Kim , Jung Keun Cho
- 申请人地址: KR Chungcheongnam-do
- 专利权人: Semes Co., Ltd.
- 当前专利权人: Semes Co., Ltd.
- 当前专利权人地址: KR Chungcheongnam-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2006-0082800 20060830
- 主分类号: F26B11/02
- IPC分类号: F26B11/02
摘要:
A spin head includes a rotatable plate, first chucking pins and second chucking pins for supporting a edge portion of a substrate loaded on the plate, and a driving unit for selectively driving the first and second chucking pins. The driving unit includes a first magnet connected to the first chucking pin and disposed at a first height, a second magnet connected to the second chucking pin and disposed at a second height, and a driving magnet for driving the first and second magnets. The driving magnet is elevated by means of an elevating member to selectively apply a magnetic force to the first or second magnet and moves in the radius outside direction of the first or second chucking pin due to a magnetic force.
公开/授权文献
- US20080052948A1 Spin head and substrate treating method using the same 公开/授权日:2008-03-06
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