公开(公告)号：US08834632B2

公开(公告)日：2014-09-16

申请号：US11987477

申请日：2007-11-30

申请人： Ho-Soo Hwang ,  Sung-Soo Kim ,  Jung-Keun Cho

发明人： Ho-Soo Hwang ,  Sung-Soo Kim ,  Jung-Keun Cho

IPC分类号： C01B31/02 ,  B01J19/00 ,  B82Y40/00 ,  B82Y30/00

CPC分类号： C01B31/0233 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  Y10S977/843

摘要： In a method of manufacturing a carbon nanotube, a boat configured to receive substrates is positioned outside of a synthesis space where the carbon nanotube is synthesized. The substrates are loaded into the boat. The boat is then transferred to the synthesis space. A process for forming the carbon nanotube is performed on the substrates in the synthesis space to form the carbon nanotube. Thus, the carbon nanotube may be effectively manufactured.

摘要翻译： 在制造碳纳米管的方法中，构造成接收基板的舟皿位于合成碳纳米管的合成空间的外侧。 基板装载到船上。 然后将船转移到合成空间。 在合成空间的基板上进行形成碳纳米管的工序，形成碳纳米管。 因此，可以有效地制造碳纳米管。

公开(公告)号：US08256774B2

公开(公告)日：2012-09-04

申请号：US11896351

申请日：2007-08-31

申请人： Jung Keun Cho ,  Kyo-Woog Koo ,  Bo Ram Chan Sung

发明人： Jung Keun Cho ,  Kyo-Woog Koo ,  Bo Ram Chan Sung

IPC分类号： B23B31/103

CPC分类号： B23B31/1269 ,  B23B2265/12 ,  H01L21/68728 ,  Y10T279/18

摘要： A chucking member configured to chuck the edge of a substrate includes a chucking pin which is eccentric from the rotation center. The chucking pin has a streamline shape and includes a first front-end portion disposed at the front end relative to the flow of an air current generated by the rotation of the substrate and a first back-end portion disposed at the back end relative to the flow of the air current. The first front-end portion includes a first tip, and the first front-end portion has a round shape.

摘要翻译： 构造成夹持基板的边缘的夹紧构件包括从旋转中心偏心的夹紧销。 夹紧销具有流线形状，并且包括相对于由基板的旋转产生的气流的流动而位于前端的第一前端部分和设置在后端相对于基板的第一后端部分 气流的流动。 第一前端部包括第一末端，第一前端部具有圆形。

公开(公告)号：US08038838B2

公开(公告)日：2011-10-18

申请号：US11945342

申请日：2007-11-27

申请人： Ju Won Kim ,  Ki Hoon Choi ,  Jung Keun Cho ,  Kyo Woog Koo ,  Jung Bong Choi

发明人： Ju Won Kim ,  Ki Hoon Choi ,  Jung Keun Cho ,  Kyo Woog Koo ,  Jung Bong Choi

IPC分类号： H01L21/68 ,  H01L21/027

CPC分类号： H01L21/68728 ,  H01L21/68742

摘要： A spin head includes chucking pins configures to chuck and unchuck a substrate. Contact portions of the chucking pins and the substrate are varied during a process to prevent a treating solution from remaining at the contact portions.

摘要翻译： 旋转头包括夹紧销配置为卡盘和解锁基板。 夹持销和基板的接触部分在防止处理溶液残留在接触部分的过程中变化。

公开(公告)号：US07934513B2

公开(公告)日：2011-05-03

申请号：US10574113

申请日：2004-10-07

申请人： Joung-Hyeon Lim ,  Jung-Keun Cho ,  Kyo-Woog Koo ,  In-Ho Bang ,  Woo-Young Kim ,  Man-Seok Oh ,  Hyun-Jong Kim

发明人： Joung-Hyeon Lim ,  Jung-Keun Cho ,  Kyo-Woog Koo ,  In-Ho Bang ,  Woo-Young Kim ,  Man-Seok Oh ,  Hyun-Jong Kim

IPC分类号： B08B3/00

CPC分类号： H01L21/67207 ,  H01L21/67017 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/67057 ,  H01L21/67173 ,  H01L21/67745

摘要： A facility for cleaning substrates such as semiconductor wafers includes a loading/unloading part, an aligning part where wafers are repositioned from a horizontal state to a vertical state, a cleaning part performing etchant-treating, rinsing, and drying processes for wafers and having a plurality of process chamber stacked, and an interface part where a transfer bath is disposed to transfer wafers between the process chambers. When the wafers are transferred between the process chamber, the transfer bath is filled with deionized water (DI water) to prevent their exposure to the air. Wafers drawn out of the loading/unlading part are repositioned from a horizontal state to a vertical state and are transferred to a first process chamber being one of the process chambers to be subjected to a part of processes. After the wafers are transferred to a second process chamber being the other one of the process chambers to be subjected to the other processes, they are repositioned from a vertical state to a horizontal state. That is, the wafers are transferred along a loop shape to be processed.

摘要翻译： 用于清洁诸如半导体晶片的基板的设备包括装载/卸载部分，其中晶片从水平状态重新定位到垂直状态的对准部分，执行晶片的蚀刻处理，漂洗和干燥处理的清洁部件，并且具有 多个处理室堆叠，以及界面部分，其中设置传送槽以在处理室之间传送晶片。 当晶片在处理室之间转移时，转移浴用去离子水（DI水）填充，以防止它们暴露于空气中。 从加载/非拉伸部分引出的晶片从水平状态重新定位到垂直状态，并被转移到作为处理室之一进行一部分处理的第一处理室。 在将晶片转移到作为要进行其它处理的另一个处理室的第二处理室之后，它们从垂直状态重新定位到水平状态。 也就是说，晶片沿着要被处理的环形传送。

公开(公告)号：US20100278713A1

公开(公告)日：2010-11-04

申请号：US11987477

申请日：2007-11-30

申请人： Ho-Soo Hwang ,  Sung-Soo Kim ,  Jung-Keun Cho

发明人： Ho-Soo Hwang ,  Sung-Soo Kim ,  Jung-Keun Cho

IPC分类号： C01B31/02 ,  B01J19/00

CPC分类号： C01B31/0233 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  Y10S977/843

摘要： In a method of manufacturing a carbon nanotube, a boat configured to receive substrates is positioned outside of a synthesis space where the carbon nanotube is synthesized. The substrates are loaded into the boat. The boat is then transferred to the synthesis space. A process for forming the carbon nanotube is performed on the substrates in the synthesis space to form the carbon nanotube. Thus, the carbon nanotube may be effectively manufactured.

摘要翻译： 在制造碳纳米管的方法中，构造成接收基板的舟皿位于合成碳纳米管的合成空间的外侧。 基板装载到船上。 然后将船转移到合成空间。 在合成空间的基板上进行形成碳纳米管的工序，形成碳纳米管。 因此，可以有效地制造碳纳米管。

公开(公告)号：US20080127888A1

公开(公告)日：2008-06-05

申请号：US11945342

申请日：2007-11-27

申请人： Ju Won Kim ,  Ki Hoon Choi ,  Jung Keun Cho ,  Kyo Woog Koo ,  Jung Bong Choi

发明人： Ju Won Kim ,  Ki Hoon Choi ,  Jung Keun Cho ,  Kyo Woog Koo ,  Jung Bong Choi

IPC分类号： B05C13/02 ,  B05D3/12 ,  B05C5/00 ,  B05C13/00

CPC分类号： H01L21/68728 ,  H01L21/68742

摘要： A spin head includes chucking pins configures to chuck and unchuck a substrate. Contact portions of the chucking pins and the substrate are varied during a process to prevent a treating solution from remaining at the contact portions.

摘要翻译： 旋转头包括夹紧销配置为卡盘和解锁基板。 夹持销和基板的接触部分在防止处理溶液残留在接触部分的过程中变化。

公开(公告)号：US20080061519A1

公开(公告)日：2008-03-13

申请号：US11896351

申请日：2007-08-31

申请人： Jung Keun Cho ,  Kyo-Woog Koo ,  Bo Ram Chan Sung

发明人： Jung Keun Cho ,  Kyo-Woog Koo ,  Bo Ram Chan Sung

IPC分类号： B23B5/22

CPC分类号： B23B31/1269 ,  B23B2265/12 ,  H01L21/68728 ,  Y10T279/18

摘要： A chucking member configured to chuck the edge of a substrate includes a chucking pin which is eccentric from the rotation center. The chucking pin has a streamline shape and includes a first front-end portion disposed at the front end relative to the flow of an air current generated by the rotation of the substrate and a first back-end portion disposed at the back end relative to the flow of the air current. The first front-end portion includes a first tip, and the first front-end portion has a round shape.

摘要翻译： 构造成夹持基板的边缘的夹紧构件包括从旋转中心偏心的夹紧销。 夹紧销具有流线形状，并且包括相对于由基板的旋转产生的气流的流动而位于前端的第一前端部分和设置在后端相对于基板的第一后端部分 气流的流动。 第一前端部包括第一末端，第一前端部具有圆形。

公开(公告)号：US20080014358A1

公开(公告)日：2008-01-17

申请号：US11809170

申请日：2007-05-31

申请人： Kyo-Woog Koo ,  Jung Keun Cho ,  Bo Ram Chan Sung

发明人： Kyo-Woog Koo ,  Jung Keun Cho ,  Bo Ram Chan Sung

IPC分类号： B05C13/00

CPC分类号： H01L21/67051 ,  H01L21/67028 ,  H01L21/67034

摘要： An apparatus is provided for supplying a plurality of chemicals or gases to the surface of a substrate to clean and dry the substrate. The apparatus includes a substrate support unit with a chuck on which a substrate is loaded, a bottom chamber having an open top and configured to surround the circumference of the chuck, a top chamber configured to open or close the top of the bottom chamber such that a drying treatment for the substrate is performed while the substrate is isolated from the outside, and an indirect injection nozzle installed at the edge of the top chamber and configured to inject drying fluid toward the center of the top chamber such that the drying fluid is indirectly injected to the substrate. According to the apparatus, it is possible to enhance a substrate drying efficiency, suppress external contamination, and prevent the formation of an oxide layer.

摘要翻译： 提供了一种用于将多种化学物质或气体供应到基底表面以清洁和干燥基底的装置。 该装置包括具有卡盘的基板支撑单元，其上装载有基板，底部室具有敞开的顶部并且构造成围绕卡盘的圆周;顶部腔室，其构造成打开或关闭底部腔室的顶部，使得 在将基板从外部隔离的同时进行基板的干燥处理，以及间接注入喷嘴，其安装在顶部室的边缘并且被配置为朝向顶部室的中心注入干燥流体，使得干燥流体间接地 注入基材。 根据该装置，能够提高基板干燥效率，抑制外部污染，防止形成氧化物层。

公开(公告)号：US20060081269A1

公开(公告)日：2006-04-20

申请号：US11073687

申请日：2005-03-08

申请人： One-Vai Kim ,  Jae-Sun Han ,  Jeong-Yong Bae ,  Jung-Keun Cho

发明人： One-Vai Kim ,  Jae-Sun Han ,  Jeong-Yong Bae ,  Jung-Keun Cho

IPC分类号： C23G1/00 ,  B08B3/00 ,  B08B3/12

CPC分类号： H01L21/67051 ,  B08B3/024 ,  C23G5/00 ,  H01L21/67028

摘要： The present invention is directed to a method and an apparatus for cleaning and drying wafers. The apparatus includes an injection unit having first and second injection ports configured for injecting different fluids and arranged in a moving direction of the rose or on a line adjacent to the moving direction. The injection unit migrates straightly from the center of a wafer to the edge thereof, and the first and second injection ports are linearly arranged on a moving line of the nozzle.

摘要翻译： 本发明涉及一种用于清洗和干燥晶片的方法和设备。 该装置包括具有第一和第二注射端口的注射单元，该第一和第二注射端口配置用于注射不同的流体并沿着玫瑰的移动方向或与移动方向相邻的线布置。 注射单元从晶片的中心直线移动到其边缘，并且第一和第二注入口线性地布置在喷嘴的移动线上。

公开(公告)号：US07862765B2

公开(公告)日：2011-01-04

申请号：US12274631

申请日：2008-11-20

申请人： Ho-Soo Hwang ,  Jung-Keun Cho

发明人： Ho-Soo Hwang ,  Jung-Keun Cho

IPC分类号： B29C67/00

CPC分类号： B29C45/0013 ,  B29K2995/0005

摘要： Provided are an apparatus and method for synthesizing a conductive composite with enhanced electrical conductivity. The apparatus includes: an injection-molding machine which injection-molds pellets created by mixing carbon nanotubes (CNTs) with polymers; and an electric field generator which applies an electric field to the pellets that are melted while the melted pellets are injection-molded and thus rearranges the CNTs included in a composite into which the melted pellets are injection-molded.

摘要翻译： 提供一种用于合成具有增强的导电性的导电复合材料的装置和方法。 该装置包括：注射成型机，其通过将碳纳米管（CNT）与聚合物混合而产生的颗粒注射成型; 以及电场发生器，其在熔融的颗粒被注塑成型的同时将熔融的颗粒施加电场，从而重新排列包含在熔融颗粒被注射成型的复合材料中的CNT。