发明授权
- 专利标题: Getter metal alloy coating and device and method for the production thereof
- 专利标题(中): 吸收剂金属合金涂层及其制造方法
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申请号: US10505254申请日: 2003-02-27
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公开(公告)号: US07871679B2公开(公告)日: 2011-01-18
- 发明人: Hartmut Reich-Sprenger
- 申请人: Hartmut Reich-Sprenger
- 申请人地址: DE Darmstadt
- 专利权人: Gesellschaft fuer Schwerionenforschung mbH
- 当前专利权人: Gesellschaft fuer Schwerionenforschung mbH
- 当前专利权人地址: DE Darmstadt
- 代理机构: Frommer Lawrence & Haug LLP
- 代理商 Ronald R. Santucci
- 优先权: DE10209423 20020305
- 国际申请: PCT/EP03/02031 WO 20030227
- 国际公布: WO03/074753 WO 20030912
- 主分类号: H05H1/48
- IPC分类号: H05H1/48
摘要:
The invention relates to a coating comprising a getter metal alloy and to an arrangement and method for the production thereof. The coating therein consists of a non-vaporizing getter metal alloy (2) for an inner wall (3) of a high-vacuum vessel (4). The arrangement basically consists of a metal plasma generator (7), which in turn comprises an insulator member (8), which carries an ignition electrode (9) and a cathode wire (10) comprising a getter metal alloy (2). Those three components are surrounded by a cage-like anode member (13), which together with the insulation member (8) projects into the high vacuum vessel (5) to be coated and is supplied with cathode potential (12), high-voltage ignition pulse (19) and anode potential (14) by a voltage supply device (16), the anode member (13) together with the high-vacuum vessel (4) being held at ground potential.
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