发明授权
- 专利标题： Piezoelectric element, ink jet head and producing method for piezoelectric element
- 专利标题（中）： 压电元件，喷墨头和压电元件的制造方法
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申请号： US11774145申请日： 2007-07-06
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公开(公告)号： US07874649B2公开(公告)日： 2011-01-25
- 发明人: Takanori Matsuda , Toshihiro Ifuku , Kenichi Takeda , Katsumi Aoki
- 申请人： Takanori Matsuda , Toshihiro Ifuku , Kenichi Takeda , Katsumi Aoki
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2006-194699 20060714
- 主分类号： B41J2/045
- IPC分类号： B41J2/045
摘要：
A piezoelectric element comprises a piezoelectric film disposed on a substrate and a pair of electrodes disposed in contact with the piezoelectric film and utilizing a bending mode. The piezoelectric film includes domains constituted of a tetragonal crystal and including an a-domain which is formed by a crystal having a (100) plane parallel to the film surface of the piezoelectric film, the a-domains include an A-domain having a normal axis of (001) plane substantially parallel to a principal bending direction of the piezoelectric film and a B-domain having a normal axis of (001) plane substantially perpendicular to the principal bending direction of the piezoelectric film, and the A-domains have a volume proportion larger than 50 vol % with respect to the sum of the volume of the A-domains and the volume of the B-domains.
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