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    Piezoelectric element, ink jet head and producing method for piezoelectric element
    2.
    发明授权
    Piezoelectric element, ink jet head and producing method for piezoelectric element 有权
    压电元件，喷墨头和压电元件的制造方法

    公开(公告)号：US08033654B2

    公开(公告)日：2011-10-11

    申请号：US12893726

    申请日：2010-09-29

    申请人： Takanori Matsuda ,  Toshihiro Ifuku ,  Kenichi Takeda ,  Katsumi Aoki

    发明人： Takanori Matsuda ,  Toshihiro Ifuku ,  Kenichi Takeda ,  Katsumi Aoki

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1642 ,  B41J2/1646 ,  H01L41/0815 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316

    摘要： A piezoelectric element includes a piezoelectric film disposed on a substrate and a pair of electrodes disposed in contact with the piezoelectric film and utilizing a bending mode. The piezoelectric film includes domains constituted of a tetragonal crystal and including an a-domain which is formed by a crystal having a (100) plane parallel to the film surface of the piezoelectric film, the a-domains include an A-domain having a normal axis of (001) plane substantially parallel to a principal bending direction of the piezoelectric film and a B-domain having a normal axis of (001) plane substantially perpendicular to the principal bending direction of the piezoelectric film, and the A-domains have a volume proportion larger than 50 vol % with respect to the sum of the volume of the A-domains and the volume of the B-domains.

    摘要翻译： 压电元件包括​​设置在基板上的压电膜和与压电膜接触设置并利用弯曲模式的一对电极。 该压电薄膜包括由四方晶体构成的并由具有与压电薄膜的膜表面平行的（100）面的晶体形成的a畴的a畴，a畴包括具有正常 基本上平行于压电薄膜的主弯曲方向的（001）面的轴线和与压电薄膜的主弯曲方向垂直的法线轴（001）面的B域，A畴具有 体积比例大于50体积％，相对于A结构域的体积和B结构域的体积的总和。

    PIEZOELECTRIC ELEMENT, INK JET HEAD AND PRODUCING METHOD FOR PIEZOELECTRIC ELEMENT
    3.
    发明申请
    PIEZOELECTRIC ELEMENT, INK JET HEAD AND PRODUCING METHOD FOR PIEZOELECTRIC ELEMENT 有权
    压电元件，喷墨头和压电元件的生产方法

    公开(公告)号：US20110018945A1

    公开(公告)日：2011-01-27

    申请号：US12893726

    申请日：2010-09-29

    申请人： Takanori Matsuda ,  Toshihiro Ifuku ,  Kenichi Takeda ,  Katsumi Aoki

    发明人： Takanori Matsuda ,  Toshihiro Ifuku ,  Kenichi Takeda ,  Katsumi Aoki

    IPC分类号： B41J2/045 ,  H01L41/00 ,  H01L41/22

    CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1642 ,  B41J2/1646 ,  H01L41/0815 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316

    摘要： A piezoelectric element comprises a piezoelectric film disposed on a substrate and a pair of electrodes disposed in contact with the piezoelectric film and utilizing a bending mode. The piezoelectric film includes domains constituted of a tetragonal crystal and including an a-domain which is formed by a crystal having a (100) plane parallel to the film surface of the piezoelectric film, the a-domains include an A-domain having a normal axis of (001) plane substantially parallel to a principal bending direction of the piezoelectric film and a B-domain having a normal axis of (001) plane substantially perpendicular to the principal bending direction of the piezoelectric film, and the A-domains have a volume proportion larger than 50 vol % with respect to the sum of the volume of the A-domains and the volume of the B-domains.

    摘要翻译： 压电元件包括​​设置在基板上的压电膜和与压电膜接触设置并利用弯曲模式的一对电极。 该压电薄膜包括由四方晶体构成的并由具有与压电薄膜的膜表面平行的（100）面的晶体形成的a畴的a畴，A畴包括具有正常的 基本上平行于压电薄膜的主弯曲方向的（001）面的轴线和与压电薄膜的主弯曲方向垂直的法线轴（001）面的B域，A畴具有 体积比例大于50体积％，相对于A结构域的体积和B结构域的体积的总和。

    Piezoelectric actuator and liquid discharge head using the same
    8.
    发明授权
    Piezoelectric actuator and liquid discharge head using the same 有权
    压电致动器和排液头使用相同

    公开(公告)号：US07999441B2

    公开(公告)日：2011-08-16

    申请号：US12237933

    申请日：2008-09-25

    申请人： Katsumi Aoki ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

    发明人： Katsumi Aoki ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

    IPC分类号： H01L41/04

    CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/0478 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/316 ,  H01L41/319

    摘要： The piezoelectric actuator includes a piezoelectric film between two electrode layers and a diaphragm. Assuming that: each elastic coefficient of all materials is isotropic and a distortion amount of the piezoelectric film by an electric field is isotropic in all in-plane directions; a point located on a diaphragm surface and having a maximum displacement when a predetermined electric field is applied to distort the piezoelectric film, is expressed by PδMAX; and a point located on a circumference of a reference-circle having PδMAX as a center and having a minimum difference in displacement from PδMAX is expressed by PδA, the diaphragm has a shape capable of determining an axis A1 set in a straight-line joining PδMAX and PδA, the diaphragm comprises a single-crystalline-material in which a plane orthogonal to A1 and perpendicular to an axis A2 on the diaphragm surface, is a {110}-plane, and the piezoelectric film is a {100}-single-orientation film.

    摘要翻译： 压电致动器包括在两个电极层和隔膜之间的压电膜。 假设：所有材料的每个弹性系数是各向同性的，并且通过电场的压电膜的失真量在所有面内方向都是各向同性的; 当施加预定电场以使压电膜失真时，位于膜片表面上并具有最大位移的点由PδMAX表示; 以PδMAX为中心并且具有与PδMAX的位移的最小差异的基准圆的圆周上的点由PδA表示，所述隔膜具有能够确定在直线接合PδMAX中设定的轴A1的形状 和PδA，所述隔膜包括其中与A1正交并垂直于所述膜表面上的轴线A2的平面为{110}面的单晶材料，并且所述压电膜为{100} - 单晶材料， 定向电影。

    PIEZOELECTRIC ACTUATOR AND LIQUID DISCHARGE HEAD USING THE SAME
    9.
    发明申请
    PIEZOELECTRIC ACTUATOR AND LIQUID DISCHARGE HEAD USING THE SAME 有权
    压电致动器和使用其的液体排出头

    公开(公告)号：US20090091215A1

    公开(公告)日：2009-04-09

    申请号：US12237933

    申请日：2008-09-25

    申请人： Katsumi Aoki ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

    发明人： Katsumi Aoki ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

    IPC分类号： H01L41/00

    CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/0478 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/316 ,  H01L41/319

    摘要： The piezoelectric actuator includes a piezoelectric film between two electrode layers and a diaphragm. Assuming that: each elastic coefficient of all materials is isotropic and a distortion amount of the piezoelectric film by an electric field is isotropic in all in-plane directions; a point located on a diaphragm surface and having a maximum displacement when a predetermined electric field is applied to distort the piezoelectric film, is expressed by PδMAX; and a point located on a circumference of a reference-circle having PδMAX as a center and having a minimum difference in displacement from PδMAX is expressed by PδA, the diaphragm has a shape capable of determining an axis A1 set in a straight-line joining PδMAX and PδA, the diaphragm comprises a single-crystalline-material in which a plane orthogonal to A1 and perpendicular to an axis A2 on the diaphragm surface, is a {110}-plane, and the piezoelectric film is a {100}-single-orientation film.

    摘要翻译： 压电致动器包括在两个电极层和隔膜之间的压电膜。 假设：所有材料的每个弹性系数是各向同性的，并且通过电场的压电膜的失真量在所有面内方向都是各向同性的; 位于膜片表面上并且当施加预定电场以使压电膜失真时具有最大位移的点由PdeltaMAX表示; 并且位于具有PdeltaMAX作为中心并且具有与PdeltaMAX的位移的最小差异的参考圆的圆周上的点由PdeltaA表示，所述隔膜具有能够确定在连接PdeltaMAX的直线中设置的轴A1的形状 和PdeltaA，隔膜包括其中与A1正交并垂直于膜片表面上的轴线A2的平面为{110}面的单晶材料，并且压电膜为{100} - 单晶材料， 定向电影。

    PIEZOELECTRIC SUBSTANCE ELEMENT, LIQUID DISCHARGE HEAD UTILIZING THE SAME AND OPTICAL ELEMENT
    10.
    发明申请
    PIEZOELECTRIC SUBSTANCE ELEMENT, LIQUID DISCHARGE HEAD UTILIZING THE SAME AND OPTICAL ELEMENT 有权
    压电元件，液体放电头，使用它们和光学元件

    公开(公告)号：US20070215715A1

    公开(公告)日：2007-09-20

    申请号：US11683100

    申请日：2007-03-07

    申请人： Tetsuro Fukui ,  Kenichi Takeda ,  Katsumi Aoki ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Hiroshi Funakubo ,  Shintaro Yokoyama ,  Takashi Katoda ,  Ken Nishida

    发明人： Tetsuro Fukui ,  Kenichi Takeda ,  Katsumi Aoki ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Hiroshi Funakubo ,  Shintaro Yokoyama ,  Takashi Katoda ,  Ken Nishida

    IPC分类号： B05B1/08

    CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/1876

    摘要： The invention is to provide an optical element satisfactory in transparency and characteristics as an optical modulation element, and a piezoelectric substance element satisfactory in precision and reproducibility as a fine element such as MEMS. The piezoelectric substance element includes, on a substrate, at least a first electrode, a piezoelectric substance film and a second electrode; wherein the piezoelectric substance film does not contain a layer-structured boundary plane; the crystal phase constituting the piezoelectric substance film comprises at least two of a tetragonal, a rhombohedral, a pseudocubic, an orthorhombic and a monoclinic; and the piezoelectric substance film includes, in a portion in which a change in the composition is within a range of ±2%, a portion where a proportion of the different crystal phases changes gradually in a thickness direction of the film.

    摘要翻译： 本发明提供一种作为光调制元件的透明性和特性令人满意的光学元件，以及作为微细元件如MEMS的精度和再现性良好的压电体元件。 压电体元件在基板上至少包括第一电极，压电体膜和第二电极; 其中所述压电物质膜不包含层结构的边界面; 构成压电体膜的晶相包含四方晶，菱方，假立方，斜方晶和单斜晶中的至少两种; 并且压电体膜在组成的变化范围为±2％的范围内包括不同结晶相的比例在膜的厚度方向上逐渐变化的部分。