发明授权
US07880201B2 Optical modulator using a serpentine dielectric layer between silicon layers
有权
在硅层之间使用蛇形电介质层的光学调制器
- 专利标题： Optical modulator using a serpentine dielectric layer between silicon layers
- 专利标题（中）： 在硅层之间使用蛇形电介质层的光学调制器
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申请号： US11558289申请日： 2006-11-09
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公开(公告)号： US07880201B2公开(公告)日： 2011-02-01
- 发明人: Yurii A. Vlasov , Fengnian Xia
- 申请人： Yurii A. Vlasov , Fengnian Xia
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 主分类号： H01L29/66
- IPC分类号： H01L29/66 ; H01L29/06 ; H01L31/0352 ; H03C3/00
摘要：
The present invention is a method and an apparatus for optical modulation, for example for use in optical communications links. In one embodiment, an apparatus for optical modulation includes a first silicon layer having one or more trenches formed therein, a dielectric layer lining the first silicon layer, and a second silicon layer disposed on the dielectric layer and filling the trenches.
公开/授权文献
- US20080112032A1 Method and Apparatus for Optical Modulation 公开/授权日：2008-05-15
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