Invention Grant
US07881594B2 Heating system and method for microfluidic and micromechanical applications 有权
微流控和微机械应用的加热系统和方法

  • Patent Title: Heating system and method for microfluidic and micromechanical applications
  • Patent Title (中): 微流控和微机械应用的加热系统和方法
  • Application No.: US12005862
    Application Date: 2007-12-27
  • Publication No.: US07881594B2
    Publication Date: 2011-02-01
  • Inventor: Ming FangFuchao Wang
  • Applicant: Ming FangFuchao Wang
  • Applicant Address: US TX Carrollton
  • Assignee: STMicroeletronics, Inc.
  • Current Assignee: STMicroeletronics, Inc.
  • Current Assignee Address: US TX Carrollton
  • Agent David V. Carlson; Lisa K. Jorgenson
  • Main IPC: F24H1/10
  • IPC: F24H1/10
Heating system and method for microfluidic and micromechanical applications
Abstract:
An integrated semiconductor heating assembly includes a semiconductor substrate, a chamber formed therein, and an exit port in fluid communication with the chamber, allowing fluid to exit the chamber in response to heating the chamber. The integrated heating assembly includes a first heating element adjacent the chamber, which can generate heat above a selected threshold and bias fluid in the chamber toward the exit port. A second heating element is positioned adjacent the exit port to generate heat above a selected threshold, facilitating movement of the fluid through the exit port away from the chamber. Addition of the second heating element reduces the amount of heat emitted per heating element and minimizes thickness of a heat absorption material toward an open end of the exit port. Since such material is expensive, this reduces the manufacturing cost and retail price of the assembly while improving efficiency and longevity thereof.
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