- 专利标题: High density interconnect system having rapid fabrication cycle
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申请号: US12354520申请日: 2009-01-15
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公开(公告)号: US07884634B2公开(公告)日: 2011-02-08
- 发明人: Fu Chiung Chong , Andrew Kao , Douglas McKay , Anna Litza , Douglas Modlin , Sammy Mok , Nitin Parekh , Frank John Swiatowiec , Zhaohui Shan
- 申请人: Fu Chiung Chong , Andrew Kao , Douglas McKay , Anna Litza , Douglas Modlin , Sammy Mok , Nitin Parekh , Frank John Swiatowiec , Zhaohui Shan
- 申请人地址: SG Singapore
- 专利权人: Verigy (Singapore) Pte, Ltd
- 当前专利权人: Verigy (Singapore) Pte, Ltd
- 当前专利权人地址: SG Singapore
- 代理商 Manuel F. de la Cerra
- 主分类号: G01R31/26
- IPC分类号: G01R31/26
摘要:
An improved interconnection system and method is described, such as for connectors, socket assemblies and/or probe card systems. An exemplary system comprises a probe card interface assembly (PCIA) for establishing electrical connections to a semiconductor wafer mounted in a prober. The PCIA comprises a motherboard parallel to the semiconductor wafer having an upper surface and an opposing lower planar mounting surface, a reference plane defined by a least three points located between the lower surface of the motherboard and the wafer, at least one component located below the motherboard mounting surface, and a mechanism for adjusting the planarity of the reference plane with respect to the wafer. A probe chip having a plurality of spring probes extending there from is mountable and demountable from the PCIA, without the need for further planarity adjustment. The interconnection structures and methods preferably provide improved fabrication cycles.
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