发明授权
- 专利标题: Thin film capacitor-embedded printed circuit board and method of manufacturing the same
- 专利标题(中): 薄膜电容器嵌入式印刷电路板及其制造方法
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申请号: US12370818申请日: 2009-02-13
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公开(公告)号: US07886436B2公开(公告)日: 2011-02-15
- 发明人: Jin Seok Moon , Yul Kyo Chung , Soo Hyun Lyoo , Seung Hyun Sohn
- 申请人: Jin Seok Moon , Yul Kyo Chung , Soo Hyun Lyoo , Seung Hyun Sohn
- 申请人地址: KR Kyungki-do
- 专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人地址: KR Kyungki-do
- 代理机构: McDermott Will & Emery LLP
- 优先权: KR10-2005-0105942 20051107
- 主分类号: H05K3/10
- IPC分类号: H05K3/10
摘要:
Disclosed herein is a printed circuit board with an embedded thin-film capacitor, and a method of manufacturing the same.Specifically, the present invention relates to a printed circuit board with an embedded thin-film capacitor, comprising a lower electrode formed on an insulating substrate; an amorphous paraelectric film formed on the lower electrode; a metal seed layer formed on the paraelectric film; and an upper electrode formed on the metal seed layer and having a surface roughness (Ra) of more than 300 nm; and a method of manufacturing a printed circuit board with an embedded thin-film capacitor, comprising forming a lower electrode on an insulating substrate; forming an amorphous paraelectric film on the lower electrode, using a low-temperature film formation process; forming a metal seed layer on the paraelectric film; and forming an upper electrode having a surface roughness (Ra) of more than 300 nm on the metal seed layer, using an electroplating method.
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