发明授权
- 专利标题: Bonding apparatus and bonding stage height adjustment method for the bonding apparatus
- 专利标题(中): 接合装置的接合装置和接合台高度调节方法
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申请号: US12841386申请日: 2010-07-22
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公开(公告)号: US07886956B2公开(公告)日: 2011-02-15
- 发明人: Kohei Seyama , Yutaka Kondo , Osamu Kakutani , Shigeru Hayata
- 申请人: Kohei Seyama , Yutaka Kondo , Osamu Kakutani , Shigeru Hayata
- 申请人地址: JP Tokyo
- 专利权人: Shinkawa Ltd.
- 当前专利权人: Shinkawa Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Katten Muchin Rosenman LLP
- 优先权: JP2008-014148 20080124
- 主分类号: B23K31/02
- IPC分类号: B23K31/02 ; B23K37/00
摘要:
A bonding apparatus includes: a reference plane; a bonding arm configured to be rotated about a rotation center that is arranged separately from the reference plane and to move a capillary attached at a tip end thereof obliquely toward and away from the reference plane; and an imaging device for optically detecting bonding positions on a semiconductor chip and/or a lead frame, in which an angle between an optical axis being heading for the imaging device from the reference plane and the reference plane is approximately equal to an angle between a motion trajectory of a tip end of the capillary and the reference plane, and thereby the bonding apparatus can have a wide bonding area with a simple mechanism as well as perform high-speed and high-accuracy bonding.
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