发明授权
- 专利标题: Indirectly heated cathode clamp system and method
- 专利标题(中): 间接加热阴极夹系统及方法
-
申请号: US11194260申请日: 2005-08-01
-
公开(公告)号: US07887034B2公开(公告)日: 2011-02-15
- 发明人: Stephen Krause , Eric R. Cobb , Russell Low
- 申请人: Stephen Krause , Eric R. Cobb , Russell Low
- 申请人地址: US MA Gloucester
- 专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址: US MA Gloucester
- 主分类号: B25B3/00
- IPC分类号: B25B3/00
摘要:
A method and clamp system for use on an ion implanter system for aligning a cathode and filament relative to one another in-situ are disclosed. The invention includes a clamp system having a clamp including a first clamp member separably coupled to a second clamp member, and an opening to a mount portion of one of the cathode and the filament in at least one of the clamp members. Each clamp member includes a surface to engage a mount portion of one of the cathode and the filament. The opening is adapted to receive a positioning tool to position the cathode and the filament relative to one another by moving the mount portion when the clamp is released. The mount portion may include a tool receiving member to facilitate accurate positioning.
公开/授权文献
- US20080072413A1 Indirectly heated cathode clamp system and method 公开/授权日:2008-03-27
信息查询