Invention Grant
- Patent Title: Electron microscope with electron spectrometer
- Patent Title (中): 电子显微镜用电子光谱仪
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Application No.: US12183726Application Date: 2008-07-31
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Publication No.: US07888641B2Publication Date: 2011-02-15
- Inventor: Shohei Terada , Yoshihumi Taniguchi , Kazutoshi Kaji
- Applicant: Shohei Terada , Yoshihumi Taniguchi , Kazutoshi Kaji
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2007-198282 20070731
- Main IPC: H01J37/05
- IPC: H01J37/05 ; H01J37/147
Abstract:
A lens adjustment method and a lens adjustment system which adjust a plurality of multi-pole lenses of an electron spectrometer attached to a transmission electron microscope, optimum conditions of the multi-pole lenses are determined through simulation based on a parameter design method using exciting currents of the multi-pole lenses as parameters.
Public/Granted literature
- US20090045340A1 ELECTRON MICROSCOPE WITH ELECTRON SPECTROMETER Public/Granted day:2009-02-19
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