Invention Grant
- Patent Title: Probe card
- Patent Title (中): 探针卡
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Application No.: US12464916Application Date: 2009-05-13
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Publication No.: US07888953B2Publication Date: 2011-02-15
- Inventor: Yuichi Taguchi , Akinori Shiraishi , Masahiro Sunohara , Kei Murayama , Hideaki Sakaguchi
- Applicant: Yuichi Taguchi , Akinori Shiraishi , Masahiro Sunohara , Kei Murayama , Hideaki Sakaguchi
- Applicant Address: JP Nagano
- Assignee: Shinko Electric Industries Co., Ltd.
- Current Assignee: Shinko Electric Industries Co., Ltd.
- Current Assignee Address: JP Nagano
- Agency: IPUSA, PLLC
- Priority: JP2008-130389 20080519
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
A probe card is disclosed that includes a board having a first surface and a second surface facing away from each other and a through hole formed between the first and second surfaces; and a probe needle having a penetration part and a support part. The penetration part is placed in the through hole without contacting the board and projects from the first and second surfaces of the board. The support part is integrated with a first one of the end portions of the penetration part and connected to one of the first and second surfaces of the board. The support part has a spring characteristic. The penetration part is configured to have a second one of its end portions come into contact with an electrode pad of a semiconductor chip at the time of conducting an electrical test on the semiconductor chip.
Public/Granted literature
- US20090284276A1 PROBE CARD Public/Granted day:2009-11-19
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