发明授权
- 专利标题: Apparatus comprising a rotating contaminant trap
- 专利标题(中): 包括旋转污染物捕集器的装置
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申请号: US11525225申请日: 2006-09-22
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公开(公告)号: US07889312B2公开(公告)日: 2011-02-15
- 发明人: Johannes Christiaan Leonardus Franken , Vadim Yevgenyevich Banine , Arnoud Cornelis Wassink
- 申请人: Johannes Christiaan Leonardus Franken , Vadim Yevgenyevich Banine , Arnoud Cornelis Wassink
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Pillsbury Winthrop Shaw Pittman LLP
- 主分类号: G03B27/52
- IPC分类号: G03B27/52 ; G03B27/54 ; G03B27/72
摘要:
A contaminant trap apparatus arranged in a path of a radiation beam to trap contaminants emanating from a radiation source configured to produce the radiation beam is disclosed. The contaminant trap apparatus includes a rotor having a plurality of channel forming elements defining channels which are arranged substantially parallel to the direction of propagation of the radiation beam, the rotor including electrically chargeable material and arranged to be electrically charged as a result of the operation of the radiation source; and a bearing configured to rotatably hold the rotor with respect to a rotor carrying structure, wherein the apparatus is configured to (i) control or redirect an electrical discharge of the rotor, or (ii) suppress an electrical discharge of the rotor, or (iii) both (i) and (ii).
公开/授权文献
- US20100259733A1 Apparatus comprising a rotating contaminant trap 公开/授权日:2010-10-14
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