发明授权
US07890893B2 Design structure for semiconductor on-chip repair scheme for negative bias temperature instability
有权
用于负偏压温度不稳定性的半导体片上修复方案的设计结构
- 专利标题: Design structure for semiconductor on-chip repair scheme for negative bias temperature instability
- 专利标题(中): 用于负偏压温度不稳定性的半导体片上修复方案的设计结构
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申请号: US12050990申请日: 2008-03-19
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公开(公告)号: US07890893B2公开(公告)日: 2011-02-15
- 发明人: Ronald J. Bolam , Tom C. Lee , Timothy D. Sullivan
- 申请人: Ronald J. Bolam , Tom C. Lee , Timothy D. Sullivan
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Gibb I.P. Law Firm, LLC
- 代理商 Richard M. Kotulak, Esq.
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
Disclosed is a design structure for a semiconductor chip structure that incorporates a localized, on-chip, repair scheme for devices that exhibit performance degradation as a result of negative bias temperature instability (NBTI). The repair scheme utilizes a heating element above each device. The heating element is configured so that it can receive transmission line pulses and, thereby generate enough heat to raise the adjacent device to a temperature sufficient to allow for performance recovery. Specifically, high temperatures (e.g., between approximately 300-400° C. or greater) in the absence of bias can accelerate the recovery process to a matter of seconds as opposed to days or months. The heating element can be activated, for example, on demand, according to a pre-set service schedule, and/or in response to feedback from a device performance monitor.
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