For maintaining the regular operating current in an inner circuit under electrostatic discharge (ESD) event, an ESD protection device is provided to control an ESD path switch in the turned-on condition by employing a MOS device and a latch-detected turned-on circuit. The MOS device has a self-aligned silicidation (Salicide) therein. The ESD protection device is used to stabilize operation efficiency and reduce the area of an ESD protection device without a silicide block disposed therein for enhancing the ESD protection capability.