发明授权
- 专利标题： Apparatus for supplying chemical liquid
- 专利标题（中）： 用于提供化学液体的设备
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申请号： US12248085申请日： 2008-10-09
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公开(公告)号： US07900853B2公开(公告)日： 2011-03-08
- 发明人: Si-Eun Kim , Kyo-Woog Koo , Keun-Young Park
- 申请人： Si-Eun Kim , Kyo-Woog Koo , Keun-Young Park
- 申请人地址： KR
- 专利权人： Semes Co., Ltd.
- 当前专利权人： Semes Co., Ltd.
- 当前专利权人地址： KR
- 代理机构： Myers Bigel Sibley & Sajovec, P.A.
- 优先权： KR10-2007-0102692 20071011
- 主分类号： B05B1/28
- IPC分类号： B05B1/28
摘要：
Provided is an apparatus for supplying chemical liquid. The apparatus includes: a plurality of nozzles, each of which can be moved forward or backward and supplies chemical liquid; a nozzle cover which accommodates the nozzles therein and has an open end to allow each of the nozzles to move into or out of the nozzle cover; and a nozzle driver which moves each of the nozzles forward or backward.
公开/授权文献
- US20090120468A1 APPARATUS FOR SUPPLYING CHEMICAL LIQUID 公开/授权日：2009-05-14
信息查询
IPC分类:
