发明授权
- 专利标题: Method for manufacturing electronic components
- 专利标题(中): 电子元件制造方法
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申请号: US12029832申请日: 2008-02-12
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公开(公告)号: US07905012B2公开(公告)日: 2011-03-15
- 发明人: Hajime Kuwajima , Hitoshi Ohkubo , Manabu Ohta
- 申请人: Hajime Kuwajima , Hitoshi Ohkubo , Manabu Ohta
- 申请人地址: JP Tokyo
- 专利权人: TDK Corporation
- 当前专利权人: TDK Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2007-089900 20070329
- 主分类号: H05K3/02
- IPC分类号: H05K3/02
摘要:
A method for manufacturing an electronic component includes: a step of temporarily bonding a substrate to a support plate with an adhesive sheet; a step of forming a cut groove for dividing the substrate into individual chips by providing the substrate with a cut extending in the thickness direction from a second surface side, located opposite the first surface side, to a certain part of the support plate; a step of forming a continuous electrode on the second surface and on a peripheral surface located inside the cut groove, of each of the chips by sputtering, for example; and a step of detaching the chips from the support plate. An electrode on the first surface of the substrate may be formed prior to the temporary bonding step, and the electrode formed on the peripheral surface may be connected to the electrode on the first surface.
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