发明授权
US07906798B2 Semiconductor device having buffer layer between sidewall insulating film and semiconductor substrate
有权
在侧壁绝缘膜和半导体衬底之间具有缓冲层的半导体器件
- 专利标题: Semiconductor device having buffer layer between sidewall insulating film and semiconductor substrate
- 专利标题(中): 在侧壁绝缘膜和半导体衬底之间具有缓冲层的半导体器件
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申请号: US11950102申请日: 2007-12-04
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公开(公告)号: US07906798B2公开(公告)日: 2011-03-15
- 发明人: Hiroyuki Ohta , Katsuaki Ookoshi
- 申请人: Hiroyuki Ohta , Katsuaki Ookoshi
- 申请人地址: JP Yokohama
- 专利权人: Fujitsu Semiconductor Limited
- 当前专利权人: Fujitsu Semiconductor Limited
- 当前专利权人地址: JP Yokohama
- 代理机构: Fujitsu Patent Center
- 优先权: JP2006-336269 20061213
- 主分类号: H01L27/092
- IPC分类号: H01L27/092
摘要:
A semiconductor device includes an NMOS transistor and a PMOS transistor. The NMOS transistor includes a channel area formed in a silicon substrate, a gate electrode formed on a gate insulating film in correspondence with the channel area, and a source area and a drain area formed in the silicon substrate having the channel area situated therebetween. The PMOS transistor includes another channel area formed in the silicon substrate, another gate electrode formed on another gate insulating film in correspondence with the other channel area, and another source area and another drain area formed in the silicon substrate having the other channel area situated therebetween. The gate electrode has first sidewall insulating films. The other gate electrode has second sidewall insulating films. The distance between the second sidewall insulating films and the silicon substrate is greater than the distance between the first sidewall insulating films and the silicon substrate.
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