Invention Grant
- Patent Title: Scattered light separation
- Patent Title (中): 散光分离
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Application No.: US12822253Application Date: 2010-06-24
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Publication No.: US07907269B2Publication Date: 2011-03-15
- Inventor: Steven W. Meeks
- Applicant: Steven W. Meeks
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka, Neely & Graham, P.C.
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/00

Abstract:
An apparatus for detecting top scattered light from a substrate. A source directs a light onto a position on the substrate. The light thereby reflects off in a specular beam, scatters off the top surface, and scatters off a bottom surface of the substrate. An objective receives the top and bottom scattered light. The objective has a first focal point focused on the position on the top surface of the substrate, and a second focal point focused on a pinhole field stop. The pinhole field stop passes the top scattered light that is focused on the pinhole field stop, and blocks the bottom scattered light. A sensor receives and quantifies the top scattered light.
Public/Granted literature
- US20110019197A1 Scattered Light Separation Public/Granted day:2011-01-27
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