发明授权
- 专利标题: Vertical semiconductor light-emitting device and method of manufacturing the same
- 专利标题(中): 垂直半导体发光器件及其制造方法
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申请号: US12216015申请日: 2008-06-27
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公开(公告)号: US07910389B2公开(公告)日: 2011-03-22
- 发明人: Hyun-Soo Kim , Kyu-Ho Shin , Jae-Hee Cho
- 申请人: Hyun-Soo Kim , Kyu-Ho Shin , Jae-Hee Cho
- 申请人地址: KR Gyunggi-do
- 专利权人: Samsung LED Co., Ltd.
- 当前专利权人: Samsung LED Co., Ltd.
- 当前专利权人地址: KR Gyunggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Provided is a vertical semiconductor light-emitting device and a method of manufacturing the same. The method may include sequentially forming a lower clad layer, an active layer, and an upper clad layer on a substrate to form a semiconductor layer and forming first electrode layers on the upper clad layer. A metal support layer may be formed on each of the first electrode layers and a trench may be formed between the first electrode layers. The substrate may be removed and a second electrode layer may be formed on the lower clad layer.
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