发明授权
US07910389B2 Vertical semiconductor light-emitting device and method of manufacturing the same 失效
垂直半导体发光器件及其制造方法

Vertical semiconductor light-emitting device and method of manufacturing the same
摘要:
Provided is a vertical semiconductor light-emitting device and a method of manufacturing the same. The method may include sequentially forming a lower clad layer, an active layer, and an upper clad layer on a substrate to form a semiconductor layer and forming first electrode layers on the upper clad layer. A metal support layer may be formed on each of the first electrode layers and a trench may be formed between the first electrode layers. The substrate may be removed and a second electrode layer may be formed on the lower clad layer.
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