Invention Grant
US07914248B2 Methods and apparatus for repositioning support for a substrate carrier 有权
用于重新定位衬底载体的方法和装置

Methods and apparatus for repositioning support for a substrate carrier
Abstract:
In a first aspect, a first method is provided repositioning support provided by an end effector. The first method includes the steps of (1) employing the end effector to support a substrate carrier by a bottom of the substrate carrier; (2) transferring the substrate carrier from the end effector to an intermediate support location, wherein the intermediate support location supports the substrate carrier by a bottom of the substrate carrier; (3) repositioning the end effector proximate an overhead transfer flange of the substrate carrier; (4) employing the end effector to support the substrate carrier by the overhead transfer flange of the substrate carrier; and (5) transferring the substrate carrier from the intermediate support location. Numerous other aspects are provided.
Information query
Patent Agency Ranking
0/0