Invention Grant
- Patent Title: Methods and apparatus for repositioning support for a substrate carrier
- Patent Title (中): 用于重新定位衬底载体的方法和装置
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Application No.: US12185786Application Date: 2008-08-04
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Publication No.: US07914248B2Publication Date: 2011-03-29
- Inventor: Martin R. Elliott , Michael Robert Rice
- Applicant: Martin R. Elliott , Michael Robert Rice
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan
- Main IPC: B65G47/90
- IPC: B65G47/90

Abstract:
In a first aspect, a first method is provided repositioning support provided by an end effector. The first method includes the steps of (1) employing the end effector to support a substrate carrier by a bottom of the substrate carrier; (2) transferring the substrate carrier from the end effector to an intermediate support location, wherein the intermediate support location supports the substrate carrier by a bottom of the substrate carrier; (3) repositioning the end effector proximate an overhead transfer flange of the substrate carrier; (4) employing the end effector to support the substrate carrier by the overhead transfer flange of the substrate carrier; and (5) transferring the substrate carrier from the intermediate support location. Numerous other aspects are provided.
Public/Granted literature
- US20080286076A1 METHODS AND APPARATUS FOR REPOSITIONING SUPPORT FOR A SUBSTRATE CARRIER Public/Granted day:2008-11-20
Information query
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