发明授权
- 专利标题: Contour-mode piezoelectric micromechanical resonators
- 专利标题(中): 轮廓模式压电微机械谐振器
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申请号: US12350847申请日: 2009-01-08
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公开(公告)号: US07915974B2公开(公告)日: 2011-03-29
- 发明人: Gianluca Piazza , Philip J. Stephanou , Albert P. Pisano
- 申请人: Gianluca Piazza , Philip J. Stephanou , Albert P. Pisano
- 申请人地址: US CA Oakland
- 专利权人: The Regents of the University of California
- 当前专利权人: The Regents of the University of California
- 当前专利权人地址: US CA Oakland
- 代理机构: Kilpatrick Townsend & Stockton LLP
- 主分类号: H03H9/00
- IPC分类号: H03H9/00 ; H03H9/54
摘要:
A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
公开/授权文献
- US20090144963A1 Contour-Mode Piezoelectric Micromechanical Resonators 公开/授权日:2009-06-11