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公开(公告)号：US20110133856A1
公开(公告)日：2011-06-09
申请号：US12850556
申请日：2010-08-04
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。
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公开(公告)号：US07492241B2
公开(公告)日：2009-02-17
申请号：US11145552
申请日：2005-06-02
IPC分类号： H03H9/00 , H03H9/54 , H01L41/08 , H01L41/053
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。
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公开(公告)号：US08319584B2
公开(公告)日：2012-11-27
申请号：US12850556
申请日：2010-08-04
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。
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公开(公告)号：US20090108959A1
公开(公告)日：2009-04-30
申请号：US12350859
申请日：2009-01-08
IPC分类号： H03H9/15
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。
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公开(公告)号：US07915974B2
公开(公告)日：2011-03-29
申请号：US12350847
申请日：2009-01-08
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。
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公开(公告)号：US07791432B2
公开(公告)日：2010-09-07
申请号：US11444913
申请日：2006-05-31
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
摘要翻译： 轮廓模式微机械压电谐振器。 谐振器具有底部电极; 顶电极 以及设置在底部电极和顶部电极之间的压电层。 压电谐振器具有平坦的表面，其具有悬臂周边，其尺寸设计成在周边处经历面内横向位移。 谐振器还包括用于在压电谐振器的厚度上施加交变电场的装置。 电场被配置为使得谐振器具有基本上在谐振器的平面表面的平面内的平面横向位移的轮廓模式，其中用于压电谐振器的位移的基频被部分光刻地设置在 底部电极，顶部电极或压电层的平面尺寸。
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公开(公告)号：US20090144963A1
公开(公告)日：2009-06-11
申请号：US12350847
申请日：2009-01-08
IPC分类号： H04R31/00
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
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公开(公告)号：US20110148251A1
公开(公告)日：2011-06-23
申请号：US12955285
申请日：2010-11-29
申请人： Gianluca Piazza , Nipun Sinha , Timothy S. Jones , Zhijun Guo , Graham E. Wabiszewski , Robert Carpick , Andre DeHon
发明人： Gianluca Piazza , Nipun Sinha , Timothy S. Jones , Zhijun Guo , Graham E. Wabiszewski , Robert Carpick , Andre DeHon
CPC分类号： H01L41/094 , H01H57/00 , H01H2057/006
摘要： Systems and methods for operating piezoelectric switches are disclosed. A piezoelectric switching system includes a first actuator, a second actuator, and a bias voltage source. The first actuator has a first body electrode, a first gate electrode, and a first contact region. The second actuator has a second body electrode, a second gate electrode, and a second contact region. The first and second contact regions are separated by a gap. The bias voltage source applies a bias voltage to the body electrodes. The bias voltage is lower in magnitude than an actuation voltage for the switch. The gate electrodes receive a switching voltage. The switching voltage causes at least one of the first and second actuators to bend, thereby closing the gap such that the second contact region electrically contacts the first contact region. The difference between the switching voltage and the bias voltage exceeds the actuation voltage of the switch.
摘要翻译： 公开了用于操作压电开关的系统和方法。 压电开关系统包括第一致动器，第二致动器和偏置电压源。 第一致动器具有第一主体电极，第一栅极电极和第一接触区域。 第二致动器具有第二主体电极，第二栅电极和第二接触区域。 第一和第二接触区域间隔开。 偏置电压源向体电极施加偏置电压。 偏置电压的幅度要小于开关的启动电压。 栅电极接收开关电压。 开关电压导致第一和第二致动器中的至少一个弯曲，从而闭合间隙，使得第二接触区域电接触第一接触区域。 开关电压和偏置电压之间的差异超过开关的致动电压。
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公开(公告)号：US20100190270A1
公开(公告)日：2010-07-29
申请号：US12693046
申请日：2010-01-25
IPC分类号： G01N33/551 , G01N29/02 , B05D5/12 , H01L41/22
CPC分类号： G01N29/036 , C12Q1/6816 , G01N2291/0257 , C12Q2565/507
摘要： Systems and methods for detecting a gaseous analyte utilize a micromechanical piezoelectric resonator having a functionalization layer configured to bind with the gaseous analyte. The functionalization layer may include a layer of carbon nanotubes affixed to the resonator and coated with biopolymers configured to bind with the gaseous analyte. The gaseous analyte may be detected by operating the micromechanical piezoelectric resonator and functionalization layer in the presence of the gas, detecting a change in the resonant frequency of the resonator, and determining the concentration of the gaseous analyte from the change in resonant frequency. Finally, the layer of carbon nanotubes may be grown on the piezoelectric resonator by depositing a catalyst on a piezoelectric structure, heating the piezoelectric structure and the catalyst to enhance the growth of the carbon nanotubes, and growing the carbon nanotubes at growth sites on the piezoelectric structure.
摘要翻译： 用于检测气态分析物的系统和方法利用具有配置为与气态分析物结合的官能化层的微机械压电谐振器。 功能化层可以包括固定在谐振器上的碳纳米管层，并涂覆有配置成与气体分析物结合的生物聚合物。 可以通过在存在气体的情况下操作微机械压电谐振器和功能化层来检测气体分析物，检测谐振器的谐振频率的变化，以及根据谐振频率的变化确定气态分析物的浓度。 最后，可以通过在压电结构上沉积催化剂，在压电谐振器上生长碳纳米管层，加热压电结构和催化剂以增强碳纳米管的生长，并且在压电体的生长位置生长碳纳米管 结构体。
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公开(公告)号：US20060290449A1
公开(公告)日：2006-12-28
申请号：US11444913
申请日：2006-05-31
申请人： Gianluca Piazza , Philip Stephanou , Albert Pisano
发明人： Gianluca Piazza , Philip Stephanou , Albert Pisano
IPC分类号： H03H9/54
CPC分类号： H03H9/542 , H03H3/02 , H03H9/132 , H03H9/171 , H03H9/172 , H03H9/205 , H03H9/54 , H03H2003/027 , H03H2009/02196 , H03H2009/02354 , H03H2009/241 , Y10T29/42 , Y10T29/49005
摘要： A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.
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