发明授权
US07919348B2 Methods for protecting imaging elements of photoimagers during back side processing
有权
用于在背面处理期间保护光成像器的成像元件的方法
- 专利标题: Methods for protecting imaging elements of photoimagers during back side processing
- 专利标题(中): 用于在背面处理期间保护光成像器的成像元件的方法
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申请号: US12139068申请日: 2008-06-13
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公开(公告)号: US07919348B2公开(公告)日: 2011-04-05
- 发明人: Salman Akram , Kyle K. Kirby
- 申请人: Salman Akram , Kyle K. Kirby
- 申请人地址: KY George Town
- 专利权人: Aptina Imaging Corporation
- 当前专利权人: Aptina Imaging Corporation
- 当前专利权人地址: KY George Town
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Methods for processing photoimagers include forming one or more protective layers over the image sensing elements of a photoimager. Protective layers may facilitate thinning of the substrates of photoimagers, as well as prevent contamination of the image sensing elements and associated optical features during back side processing of the photoimagers. Blind vias, which extend from the back side of a photoimager to bond pads carried by an active surface of the photoimager, may be formed through the back side. The vias may be filled with conductive material and, optionally, redistribution circuitry may be fabricated over the back side of the photoimager. Photoimagers including features at result from such processes are also disclosed.
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