Invention Grant
- Patent Title: MEMS switch
- Patent Title (中): MEMS开关
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Application No.: US11540655Application Date: 2006-10-02
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Publication No.: US07919903B2Publication Date: 2011-04-05
- Inventor: Young-tack Hong , Dong-kyun Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Jong-seok Kim , Che-heung Kim
- Applicant: Young-tack Hong , Dong-kyun Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Jong-seok Kim , Che-heung Kim
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2006-0002643 20060110
- Main IPC: H01L41/00
- IPC: H01L41/00

Abstract:
A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.
Public/Granted literature
- US20070159510A1 MEMS switch Public/Granted day:2007-07-12
Information query
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