发明授权
- 专利标题: Method and system for adjusting characteristics of integrated relative humidity sensor
- 专利标题(中): 综合相对湿度传感器特性调整方法及系统
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申请号: US12052535申请日: 2008-03-20
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公开(公告)号: US07924028B2公开(公告)日: 2011-04-12
- 发明人: Yousef Alimi , Richard Alan Davis
- 申请人: Yousef Alimi , Richard Alan Davis
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 代理机构: Shumaker & Sieffert, P.A.
- 主分类号: G01R27/26
- IPC分类号: G01R27/26
摘要:
A method and system for adjusting characteristics of a relative humidity sensor in order to achieve a desired value of accuracy is presented. A relative humidity sensor charge balance circuit includes a series of sensing capacitors Cx1, Cx2 including a thin porous platinum top plate, a humidity sensitive polyimide dielectric, and two metal bottom plates on a semiconductor substrate; and two fixed oxide capacitances Cref, and C0. Changes in humidity affect the humidity sensitive dielectric thereby causing changes in the sensing capacitive value of the capacitive circuit. The charge in the sensing capacitor and the fixed capacitor C0 can be controlled separately by adjusting and/or trimming the supply voltage using a voltage trimmer; thereby the slope and offset of the relative humidity sensor circuit can be modified and controlled to particular desired values.