利索-全球专利检索

  1. 登录
  2. 注册
发明授权
US07924119B1 Micromechanical bulk acoustic mode resonators having interdigitated electrodes and multiple pairs of anchor supports 失效
具有交叉电极和多对锚固支架的微机械体声模式谐振器

Micromechanical bulk acoustic mode resonators having interdigitated electrodes and multiple pairs of anchor supports
摘要：
A micromechanical resonator operable in a bulk acoustic mode includes a resonator apparatus suspended over a substrate by a plurality of pairs of anchors. The resonator apparatus includes a conductive metal layer, a piezoelectric layer on the conductive metal layer and a plurality of interdigitated electrodes on the piezoelectric layer. The interdigitated electrodes are configured so that a total number of electrode fingers in the plurality of interdigitated electrodes is greater than a total number of the plurality of pairs of anchors.
摘要（中）：

以体声模式可操作的微机械谐振器包括通过多对锚固件悬挂在衬底上的谐振器装置。 谐振器装置包括导电金属层，导电金属层上的压电层和压电层上的多个交错电极。 叉指电极被配置为使得多个叉指电极中的电极指的总数大于多对锚的总数。

信息查询
Espacenet
0/0