发明授权
- 专利标题: Image sensor having microlenses and high photosensitivity
- 专利标题(中): 具有微透镜和高感光度的图像传感器
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申请号: US12606595申请日: 2009-10-27
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公开(公告)号: US07932546B2公开(公告)日: 2011-04-26
- 发明人: Chang-Young Jeong , Dai-Ung Shin , Hong-Ik Kim
- 申请人: Chang-Young Jeong , Dai-Ung Shin , Hong-Ik Kim
- 申请人地址: US DE Wilmington
- 专利权人: Crosstek Capital, LLC
- 当前专利权人: Crosstek Capital, LLC
- 当前专利权人地址: US DE Wilmington
- 代理机构: McAndrews, Held & Malloy, Ltd.
- 优先权: KR2003-5765 20030129; KR2003-27019 20030429
- 主分类号: H01L29/66
- IPC分类号: H01L29/66
摘要:
The method for manufacturing a CMOS image sensor is employed to prevent bridge phenomenon between adjacent microlenses by employing openings between the microlenses. The method includes the steps of: preparing a semiconductor substrate including isolation regions and photodiodes therein obtained by a predetermined process; forming an interlayer dielectric (ILD), metal interconnections and a passivation layer formed on the semiconductor substrate in sequence; forming a color filter array having a plurality of color filters on the passivation layer; forming an over-coating layer (OCL) on the color filter array by using a positive photoresist or a negative photoresist; forming openings in the OCL by patterning the OCL by using a predetermined mask; and forming dome-typed microlenses on a patterned OCL.
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