发明授权
- 专利标题: Electronic component sealing substrate for hermetically sealing a micro electronic mechanical system of an electronic component
- 专利标题(中): 用于密封电子部件的微电子机械系统的电子部件密封基板
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申请号: US12094132申请日: 2006-11-16
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公开(公告)号: US07932594B2公开(公告)日: 2011-04-26
- 发明人: Toshihiko Maeda , Katsuyuki Yoshida , Kouzou Makinouchi
- 申请人: Toshihiko Maeda , Katsuyuki Yoshida , Kouzou Makinouchi
- 申请人地址: JP Kyoto
- 专利权人: Kyocera Corporation
- 当前专利权人: Kyocera Corporation
- 当前专利权人地址: JP Kyoto
- 代理机构: DLA Piper LLP (US)
- 优先权: JP2005-331750 20051116; JP2005-340842 20051125; JP2005-353227 20051207
- 国际申请: PCT/JP2006/322896 WO 20061116
- 国际公布: WO2007/058280 WO 20070524
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
An electronic component sealing substrate capable of configuring an electronic apparatus in which the influence of electromagnetic coupling and radio frequency noises between an electrical connection path and a micro electronic mechanical system is suppressed is provided. An electronic component sealing substrate (4) for hermetically sealing a micro electronic mechanical system (4) of an electronic component (2) that includes a semiconductor substrate (5), the micro electronic mechanical system (3) formed on a main face of the semiconductor substrate (5), and an electrode (6) electrically connected to the micro electronic mechanical system (3), includes an insulating substrate (7) that has a first main face joined to the main face of the semiconductor substrate (5) so as to hermetically seal the micro electronic mechanical system (3), and a wiring conductor (8) that has an end extending to the first main face of the insulating substrate (7) and is electrically connected to the electrode (6) of the electronic component (2), and the end of the wiring conductor (8) is positioned outside a joined portion of the main face of the semiconductor substrate (5) and the first main face of the insulating substrate (7).
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