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发明授权
US07936539B2 Bottom spin valve GMR sensor incorporating plural oxygen surfactant layers 有权
底部自旋阀GMR传感器结合了多个氧表面活性剂层

Bottom spin valve GMR sensor incorporating plural oxygen surfactant layers
摘要：
A bottom spin-valve GMR sensor has been fabricated that has ultra-thin layers of high density and smoothness. In addition, these layers are inherently furnished with sub-monolayer thick oxygen surfactant layers. The sensor is fabricated using a method in which the layers are sputtered in a mixture of Ar and O2. A particularly novel feature of the method is the use of a sputtering chamber with an ultra-low base pressure and correspondingly ultra-low pressure mixtures of Ar and O2 sputtering gas (
摘要（中）：

已经制造了具有高密度和平滑度的超薄层的底部自旋阀GMR传感器。 此外，这些层本质上具有亚单层厚氧表面活性剂层。 传感器使用其中层以Ar和O2的混合物溅射的方法制造。 该方法的一个特别新颖的特征是使用具有超低基础压力的溅射室和相应的Ar和O 2溅射气体（<0.5毫托）的超低压混合物，其中混合的氧气的分压较小 比5×10-9乇。

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