发明授权
- 专利标题: Process for reversing tone of patterns on integerated circuit and structural process for nanoscale fabrication
- 专利标题(中): 整流电路图案的反转色调和纳米尺寸制作的结构工艺
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申请号: US12616259申请日: 2009-11-11
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公开(公告)号: US07939446B1公开(公告)日: 2011-05-10
- 发明人: Lawrence A. Clevenger , Maxime Darnon , Anthony D. Lisi , Satya V. Nitta
- 申请人: Lawrence A. Clevenger , Maxime Darnon , Anthony D. Lisi , Satya V. Nitta
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: The Law Offices of Robert J. Elchelburg
- 代理商 Robert J. Elchelburg
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A process to produce an airgap on a substrate having a dielectric layer comprises defining lines by lithography where airgaps are required. The lines' dimensions are shrunk by a trimming process (isotropic etching). The tone of the patterns is reversed by applying a planarizing layer which is etched down to the top of the patterns. The photoresist is removed, leading to sub-lithographic trenches which are transferred into a cap layer and eventually into the dielectric between two metal lines. The exposed dielectric is eventually damaged, and is etched out, leading to airgaps between metal lines. The gap is sealed by the pinch-off occurring during the deposition of the subsequent dielectric.