发明授权
US07943974B2 Spin MOS field effect transistor and tunneling magnetoresistive effect element using stack having Heusler alloy
有权
旋转MOS场效应晶体管和隧道磁阻效应元件使用具有Heusler合金的堆叠
- 专利标题: Spin MOS field effect transistor and tunneling magnetoresistive effect element using stack having Heusler alloy
- 专利标题(中): 旋转MOS场效应晶体管和隧道磁阻效应元件使用具有Heusler合金的堆叠
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申请号: US12662100申请日: 2010-03-31
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公开(公告)号: US07943974B2公开(公告)日: 2011-05-17
- 发明人: Mizue Ishikawa , Yoshiaki Saito , Hideyuki Sugiyama , Tomoaki Inokuchi
- 申请人: Mizue Ishikawa , Yoshiaki Saito , Hideyuki Sugiyama , Tomoaki Inokuchi
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2007-218963 20070824
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L29/94
摘要:
A spin MOS field effect transistor includes a source electrode and a drain electrode each having a structure obtained by stacking an impurity diffusion layer, a (001)-oriented MgO layer and a Heusler alloy. The impurity diffusion layer is formed in a surface region of a semiconductor layer. The (001)-oriented MgO layer is formed on the impurity diffusion layer. The Heusler alloy is formed on the MgO layer.
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