发明授权
- 专利标题: Reaction force cancel system
- 专利标题(中): 反作用力取消系统
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申请号: US12219847申请日: 2008-07-29
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公开(公告)号: US07944166B2公开(公告)日: 2011-05-17
- 发明人: Takuya Hosobata , Kazuya Hioki
- 申请人: Takuya Hosobata , Kazuya Hioki
- 申请人地址: JP Shinagawa-Ku, Tokyo
- 专利权人: Sumitomo Heavy Industries
- 当前专利权人: Sumitomo Heavy Industries
- 当前专利权人地址: JP Shinagawa-Ku, Tokyo
- 代理机构: Squire, Sanders & Dempsey (US) LLP
- 优先权: JPP2007-199548 20070731
- 主分类号: G05B11/32
- IPC分类号: G05B11/32
摘要:
Stabilization of a stage in a movable stage apparatus is enhanced, and increasing in size of the movable stage apparatus is suppressed. A reaction force cancel system is provided in the movable stage apparatus where a stage moves on a surface plate installed on a floor via a vibration-isolating spring, and cancels a reaction force generated on the surface plate upon movement of the stage. The reaction force cancel system includes a reaction force canceling actuator for applying a counter-thrust that is a force for reducing the reaction force to the surface plate. The reaction force canceling actuator is arranged at a lower position than a top surface of the surface plate so that the surface plate hangs over the reaction force canceling actuator.
公开/授权文献
- US20090284207A1 Reaction force cancel system 公开/授权日:2009-11-19
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