Motor control system, motor control apparatus, and motor control method

    公开(公告)号:US11955917B2

    公开(公告)日:2024-04-09

    申请号:US17938950

    申请日:2022-09-07

    IPC分类号: G05B11/32 H02P5/50 H02P6/04

    CPC分类号: H02P5/50 H02P6/04

    摘要: A motor control system includes host control circuitry configured to generate a first control command; a plurality of motor control apparatuses configured to control a plurality of motors, respectively, based on the first control command; and reference information output circuitry configured to output reference information to one of the plurality of motor control apparatuses which is configured to control one of the plurality of motors. The reference information relates to control of the plurality of motors. Each of the plurality of motor control apparatuses corresponds to a corresponding motor among the plurality of motors and includes information sharing circuitry configured to share the reference information among the plurality of motor control apparatuses via data communication; command conversion circuitry configured to convert the reference information into a second control command; and motor control circuitry configured to control the corresponding motor based on the second control command.

    Control apparatus, exposure apparatus, and method of manufacturing article

    公开(公告)号:US11630398B2

    公开(公告)日:2023-04-18

    申请号:US17193075

    申请日:2021-03-05

    发明人: Takashi Kurihara

    摘要: The present invention provides a control apparatus for performing synchronous control to synchronize driving of a second moving member so as to follow driving of a first moving member, including a feedforward control system that includes a calculator configured to obtain an input/output response of the second moving member and position deviations of the first moving member and the second moving member while driving the first moving member and the second moving member in synchronism with each other, and calculate a feedforward manipulated variable based on the input/output response of the second moving member and the synchronous error between the first moving member and the second moving member obtained from the position deviations of the first moving member and the second moving member.

    Projector, 3D sensing module and method for fabricating the projector

    公开(公告)号:US11573485B2

    公开(公告)日:2023-02-07

    申请号:US16559564

    申请日:2019-09-03

    IPC分类号: G03B21/20 G03B21/14 G05B11/32

    摘要: A projector, a 3D sensing module and a method for fabricating the projector are provided. The 3D sensing module includes the projector and a receiver. The projector is configured to project a light beam to an object, and the receiver is configured to receive the light beam reflected from the object. The projector includes a circuit board, electronic components, a holder and a lens module. The circuit board has a plurality of first bonding pads and a plurality of second bonding pads on a top surface of the circuit board. The electronic components are bonded on the first bonding pads. The holder has a cavity and third bonding pads bonded on and electrically connected to the second bonding pads. The lens module is disposed in the cavity of the holder.

    Tripping speed modification
    5.
    发明授权

    公开(公告)号:US11326404B2

    公开(公告)日:2022-05-10

    申请号:US16176728

    申请日:2018-10-31

    发明人: Ala Eddine Omrani

    摘要: A system includes a processing device configured to determine a tripping operation to be undertaken. The processing device is configured to also calculate a variable tripping speed for the tripping operation to vary a speed of the tripping operation. The processing device is further generate an output to control the operation of a portion of a continuous tripping system to implement the tripping operation at the variable tripping speed.

    METHOD FOR COMPENSATING FOR VISUAL-MEASUREMENT TIME LAG OF ELECTRO-OPTICAL TRACKING SYSTEM

    公开(公告)号:US20210191344A1

    公开(公告)日:2021-06-24

    申请号:US17253558

    申请日:2019-07-08

    IPC分类号: G05B13/02 G05B11/42 G05B11/32

    摘要: The present invention provides a generalized proportional integral observer-based method for compensating for visual-measurement time lag of an electro-optical tracking system. For visual-measurement time lag present in an electro-optical tracking system, an improved generalized proportional integral observer-based feedback control method is used to mitigate the impact of the measurement time lag on the system and suppress kinematic uncertainty of the system. The core of the method lies in that an observer is used to estimate a state, uncertainty, and a difference of the system at a previous moment, a state and uncertainty of the system at a current moment are then calculated by using these estimated values and a state-space model of the system, and a control input of the system is finally acquired according to the estimated values of the state and uncertainty of the system at the current moment. The method mitigates the adverse impact of visual-measurement time lag on the system and enhances the uncertainty suppression and the tracking precision of the system.