Invention Grant
US07945965B2 Sensor for observations in liquid environments and observation apparatus for use in liquid environments
有权
用于液体环境中观察的传感器和用于液体环境的观察设备
- Patent Title: Sensor for observations in liquid environments and observation apparatus for use in liquid environments
- Patent Title (中): 用于液体环境中观察的传感器和用于液体环境的观察设备
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Application No.: US12416634Application Date: 2009-04-01
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Publication No.: US07945965B2Publication Date: 2011-05-17
- Inventor: Naoya Watanabe , Masatsugu Shigeno , Masato Iyoki
- Applicant: Naoya Watanabe , Masatsugu Shigeno , Masato Iyoki
- Applicant Address: JP Chiba
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2008-106897 20080416
- Main IPC: H01J37/252
- IPC: H01J37/252

Abstract:
The sensor has the self-detecting probe including a body portion, an elongated belt-like flexible substrate, connecting members, a resinous portion, and external contacts formed at the ends of the flexible substrate brought out of liquid. The probe further includes a cantilever whose base end is supported to the body portion, a strain resistive element whose resistance value varies according to the amount of displacement of the cantilever, and interconnects electrically connected with the strain resistive element. A probe tip is formed at the front end of the cantilever. The flexible substrate has an interconnect pattern sandwiched between two insulating sheets. The flexible substrate supports the body portion while the cantilever protrudes outwardly. At least one end of the flexible substrate is brought out of liquid. The connecting members connect the interconnects with the interconnect pattern. The interconnects, connecting members, and the portions of the connecting members electrically connected with the interconnect pattern are coated with the resinous portion.
Public/Granted literature
- US20090265819A1 SENSOR FOR OBSERVATIONS IN LIQUID ENVIRONMENTS AND OBSERVATION APPARATUS FOR USE IN LIQUID ENVIRONMENTS Public/Granted day:2009-10-22
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