Invention Grant
- Patent Title: Multi-layered, vertically stacked non-volatile memory device and method of fabrication
- Patent Title (中): 多层垂直堆叠的非易失性存储器件和制造方法
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Application No.: US12484339Application Date: 2009-06-15
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Publication No.: US07948024B2Publication Date: 2011-05-24
- Inventor: Suk-pil Kim , Yoon-dong Park , June-mo Koo , Tae-eung Yoon
- Applicant: Suk-pil Kim , Yoon-dong Park , June-mo Koo , Tae-eung Yoon
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2008-0067766 20080711
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A nonvolatile memory device is provided that includes; a first semiconductor layer extending in a first direction, a second semiconductor layer extending in parallel with and separated from the first semiconductor layer, an isolation layer between the first semiconductor layer and second semiconductor layer, a first control gate electrode between the first semiconductor layer and the isolation layer, a second control gate electrode between the second semiconductor layer and the isolation layer, wherein the second control gate electrode and first control gate electrode are respectively disposed at opposite sides of the isolation layer, a first charge storing layer between the first control gate electrode and the first semiconductor layer, and a second charge storing layer between the second control gate electrode and the second semiconductor layer.
Public/Granted literature
- US20100006919A1 NON-VOLATILE MEMORY DEVICE AND METHOD OF FABRICATION Public/Granted day:2010-01-14
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