发明授权
US07948044B2 Low switching current MTJ element for ultra-high STT-RAM and a method for making the same
有权
用于超高STT-RAM的低开关电流MTJ元件及其制造方法
- 专利标题: Low switching current MTJ element for ultra-high STT-RAM and a method for making the same
- 专利标题(中): 用于超高STT-RAM的低开关电流MTJ元件及其制造方法
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申请号: US12082155申请日: 2008-04-09
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公开(公告)号: US07948044B2公开(公告)日: 2011-05-24
- 发明人: Cheng T. Horng , Ru-Ying Tong , Yimin Guo
- 申请人: Cheng T. Horng , Ru-Ying Tong , Yimin Guo
- 申请人地址: US CA Milpitas
- 专利权人: MagIC Technologies, Inc.
- 当前专利权人: MagIC Technologies, Inc.
- 当前专利权人地址: US CA Milpitas
- 代理机构: Saile Ackerman LLC
- 代理商 Stephen B. Ackerman
- 主分类号: H01L29/82
- IPC分类号: H01L29/82
摘要:
A STT-RAM MTJ that minimizes spin-transfer magnetization switching current (Jc) while achieving a high dR/R is disclosed. The MTJ has a MgO tunnel barrier formed by natural oxidation to achieve a low RA, and a CoFeB/FeSiO/CoFeB composite free layer with a middle nanocurrent channel layer to minimize Jc0. There is a thin Ru capping layer for a spin scattering effect. The reference layer has a shape anisotropy and Hc substantially greater than that of the free layer to establish a “self-pinned” state. The free layer, capping layer and hard mask are formed in an upper section of a nanopillar that has an area substantially less than a lower pedestal section which includes a bottom electrode, reference layer, seed layer, and tunnel barrier layer. The reference layer is comprised of an enhanced damping constant material that may be an insertion layer, and the free layer has a low damping constant.
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