Invention Grant
- Patent Title: Acceleration sensor incorporating a piezoelectric device
- Patent Title (中): 具有压电元件的加速度传感器
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Application No.: US12053011Application Date: 2008-03-21
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Publication No.: US07950282B2Publication Date: 2011-05-31
- Inventor: Takamitsu Higuchi , Yasuhiro Ono
- Applicant: Takamitsu Higuchi , Yasuhiro Ono
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2007-076902 20070323
- Main IPC: G01P15/09
- IPC: G01P15/09

Abstract:
An acceleration sensor includes: a piezoelectric vibration device; an oscillation circuit; and a detection circuit, wherein the piezoelectric vibration device includes a substrate, an insulation layer formed above the substrate, a vibration section forming layer formed above the insulation layer, a vibration section formed in a cantilever shape in a first opening section that penetrates the vibration section forming layer and having a base section affixed to the vibration section forming layer and two beam sections extending from the base section, a second opening section that penetrates the insulation layer and formed below the first opening section and the vibration section, and a piezoelectric element section formed on each of the beam sections; the oscillation circuit vibrates the piezoelectric vibration device at a resonance frequency; and the detection circuit detects a change in the frequency of vibrations of the piezoelectric vibration device which is caused by an acceleration applied in a direction in which the beam sections extend, and outputs a signal corresponding to the acceleration based on the change in the frequency.
Public/Granted literature
- US20080229826A1 ACCELERATION SENSOR AND ELECTRONIC DEVICE Public/Granted day:2008-09-25
Information query
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