• Patent Title: Process for the collective fabrication of 3D electronic modules
  • Application No.: US12438179
    Application Date: 2007-08-03
  • Publication No.: US07951649B2
    Publication Date: 2011-05-31
  • Inventor: Christian Val
  • Applicant: Christian Val
  • Applicant Address: FR
  • Assignee: 3D Plus
  • Current Assignee: 3D Plus
  • Current Assignee Address: FR
  • Agency: Lowe Hauptman Ham & Berner, LLP
  • Priority: FR0607442 20060822
  • International Application: PCT/EP2007/058090 WO 20070803
  • International Announcement: WO2008/022901 WO 20080228
  • Main IPC: H01L21/50
  • IPC: H01L21/50
Process for the collective fabrication of 3D electronic modules
Abstract:
The invention relates to the collective fabrication of n 3D module. It comprises a step of fabricating a batch of n dies i at one and the same thin plane wafer (10) of thickness es comprising silicon, covered on one face with electrical connection pads (20), called test pads, and then with a thin electrically insulating layer (4) of thickness ei, forming the insulating substrate provided with at least one silicon electronic component (11) having connection pads (2) connected to the test pads (20) through the insulating layer. The components are encapsulated in an insulating resin (6) of thickness er, filling the spaces between the components, then separated from one another by first grooves (30) with a width L1 and a depth P1 such that ei+er
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