Invention Grant
- Patent Title: High temperature resistant solid state pressure sensor
- Patent Title (中): 耐高温固态压力传感器
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Application No.: US12579123Application Date: 2009-10-14
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Publication No.: US07952154B2Publication Date: 2011-05-31
- Inventor: Shuwen Guo , Odd Harald Steen Eriksen , David P. Potasek , Kimiko J. Childress
- Applicant: Shuwen Guo , Odd Harald Steen Eriksen , David P. Potasek , Kimiko J. Childress
- Applicant Address: US MN Burnsville
- Assignee: Rosemount Aerospace Inc.
- Current Assignee: Rosemount Aerospace Inc.
- Current Assignee Address: US MN Burnsville
- Agency: Thompson Hine LLP
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
A harsh environment transducer including a substrate having a first surface and a second surface, wherein the second surface is in communication with the environment. The transducer includes a device layer sensor means located on the substrate for measuring a parameter associated with the environment. The sensor means including a single crystal semiconductor material having a thickness of less than about 0.5 microns. The transducer further includes an output contact located on the substrate and in electrical communication with the sensor means. The transducer includes a package having an internal package space and a port for communication with the environment. The package receives the substrate in the internal package space such that the first surface of the substrate is substantially isolated from the environment and the second surface of the substrate is substantially exposed to the environment through the port. The transducer further includes a connecting component coupled to the package and a wire electrically connecting the connecting component and the output contact such that an output of the sensor means can be communicated. An external surface of the wire is substantially platinum, and an external surface of at least one of the output contact and the connecting component is substantially platinum.
Public/Granted literature
- US20100155866A1 HIGH TEMPERATURE RESISTANT SOLID STATE PRESSURE SENSOR Public/Granted day:2010-06-24
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