发明授权
US07954341B2 Method for making a blank from material, particularly for an optical component for use in microlithography
有权
用于从材料制成坯料的方法,特别是用于微光刻中使用的光学部件
- 专利标题: Method for making a blank from material, particularly for an optical component for use in microlithography
- 专利标题(中): 用于从材料制成坯料的方法,特别是用于微光刻中使用的光学部件
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申请号: US12713097申请日: 2010-02-25
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公开(公告)号: US07954341B2公开(公告)日: 2011-06-07
- 发明人: Bodo Kuehn , Stefan Ochs
- 申请人: Bodo Kuehn , Stefan Ochs
- 申请人地址: DE Hanau
- 专利权人: Heraeus Quarzglas GmbH & Co. KG
- 当前专利权人: Heraeus Quarzglas GmbH & Co. KG
- 当前专利权人地址: DE Hanau
- 代理机构: Tiajolott and Kelly LLP
- 优先权: DE102006018711 20060420
- 主分类号: C01B33/12
- IPC分类号: C01B33/12 ; C01B15/14 ; C03C3/06 ; C04B35/14 ; C04B14/04
摘要:
The invention is concerned with a material which shows low absorption for UV radiation having a wavelength below 250 nm, low birefringence, high chemical resistance and high radiation resistance and which is therefore particularly usable for making optical components for microlithography. According to the invention the material consists of synthetically produced quartz crystallites which form a polycrystalline structure and have a mean grain size in the range between 500 nm and 30 μm. The method according to the invention for making a blank from the material comprises providing granules consisting of synthetically produced quartz crystals having a mean grain size in the range between 500 nm and 30 μm, and sintering the granules to obtain a blank of polycrystalline quartz.
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