发明授权
- 专利标题: Acceleration sensor incorporating a piezoelectric device
- 专利标题(中): 具有压电元件的加速度传感器
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申请号: US12056349申请日: 2008-03-27
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公开(公告)号: US07954377B2公开(公告)日: 2011-06-07
- 发明人: Takamitsu Higuchi , Yasuhiro Ono
- 申请人: Takamitsu Higuchi , Yasuhiro Ono
- 申请人地址: JP
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP2007-084255 20070328
- 主分类号: G01P15/09
- IPC分类号: G01P15/09
摘要:
An acceleration sensor includes: a piezoelectric vibration device; an oscillation circuit; and a detection circuit, wherein the piezoelectric vibration device includes a substrate, an insulation layer formed above the substrate, a vibration section forming layer formed above the insulation layer, a vibration section formed in a cantilever shape in a first opening section that penetrates the vibration section forming layer, a second opening section that penetrates the insulation layer and formed below the first opening section and the vibration section, and a piezoelectric element section formed on the vibration section, the oscillation circuit vibrates the piezoelectric vibration device at a resonance frequency, and the detection circuit detects a change in the frequency of vibration of the piezoelectric vibration device which is caused by an acceleration applied in a direction in which the vibration section extends, and outputs a signal corresponding to the acceleration based on the change in the frequency.
公开/授权文献
- US20080236283A1 ACCELERATION SENSOR AND ELECTRONIC DEVICE 公开/授权日:2008-10-02