发明授权
- 专利标题: Transparent conductive film, sintered body target for transparent conductive film fabrication, and transparent conductive base material and display device using the same
- 专利标题(中): 透明导电膜,透明导电膜制造用烧结体靶,透明导电性基材及使用其的显示装置
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申请号: US12558857申请日: 2009-09-14
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公开(公告)号: US07960033B2公开(公告)日: 2011-06-14
- 发明人: Tokuyuki Nakayama , Yoshiyuki Abe
- 申请人: Tokuyuki Nakayama , Yoshiyuki Abe
- 申请人地址: JP Tokyo
- 专利权人: Sumitomo Metal Mining Co., Ltd.
- 当前专利权人: Sumitomo Metal Mining Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Smith, Gambrell & Russell, LLP
- 主分类号: H01B1/08
- IPC分类号: H01B1/08
摘要:
A transparent conductive film which is amorphous, has a high transmittance of light in the visible region of short wavelengths, and is hard to beak with respect to bending is provided. The transparent conductive film is an amorphous oxide film composed of Ga, In, and O, in which a Ga content ranges from 35 at. % to 45 at. % with respect to all metallic atoms, a resistivity ranges 1.2×10−3 Ω·cm to 8.0×10−3 Ω·cm a film thickness is 500 nm or less, and a transmittance of light at a wavelength of 380 nm is 45% or more.
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