Invention Grant
- Patent Title: High temperature optical pressure sensor and method of fabrication of the same
- Patent Title (中): 高温光学压力传感器及其制造方法
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Application No.: US12411878Application Date: 2009-03-26
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Publication No.: US07966887B2Publication Date: 2011-06-28
- Inventor: Aaron Jay Knobloch , David William Vernooy , Weizhuo Li , David Mulford Shaddock , Stacey Joy Kennerly
- Applicant: Aaron Jay Knobloch , David William Vernooy , Weizhuo Li , David Mulford Shaddock , Stacey Joy Kennerly
- Applicant Address: US NY Niskayuna
- Assignee: General Electric Company
- Current Assignee: General Electric Company
- Current Assignee Address: US NY Niskayuna
- Agent Scott J. Asmus
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
A high-temperature pressure sensor is provided. The sensor includes a quartz substrate with a cavity etched on one side. A reflective coating is deposited on at least a portion of the cavity. The sensor further includes a ferrule section coupled to the quartz substrate with the cavity therebetween. The cavity exists in a vacuum, and cavity gap is formed between the reflective metal coating and a surface of the ferrule. The sensor also includes an optical fiber enclosed by the ferrule section and extending from the cavity gap to an opposing end of the ferrule section and a metal casing surrounding the ferrule section and the quartz substrate with an opening for said optical fiber extending therefrom. The pressure applied to the quartz substrate changes the dimensions of the cavity gap and a reflected signal from the reflective coating is processed as a pressure.
Public/Granted literature
- US20100242628A1 HIGH TEMPERATURE OPTICAL PRESSURE SENSOR AND METHOD OF FABRICATION OF THE SAME Public/Granted day:2010-09-30
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