发明授权
- 专利标题: High temperature optical pressure sensor and method of fabrication of the same
- 专利标题(中): 高温光学压力传感器及其制造方法
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申请号: US12411878申请日: 2009-03-26
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公开(公告)号: US07966887B2公开(公告)日: 2011-06-28
- 发明人: Aaron Jay Knobloch , David William Vernooy , Weizhuo Li , David Mulford Shaddock , Stacey Joy Kennerly
- 申请人: Aaron Jay Knobloch , David William Vernooy , Weizhuo Li , David Mulford Shaddock , Stacey Joy Kennerly
- 申请人地址: US NY Niskayuna
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: US NY Niskayuna
- 代理商 Scott J. Asmus
- 主分类号: G01L9/00
- IPC分类号: G01L9/00
摘要:
A high-temperature pressure sensor is provided. The sensor includes a quartz substrate with a cavity etched on one side. A reflective coating is deposited on at least a portion of the cavity. The sensor further includes a ferrule section coupled to the quartz substrate with the cavity therebetween. The cavity exists in a vacuum, and cavity gap is formed between the reflective metal coating and a surface of the ferrule. The sensor also includes an optical fiber enclosed by the ferrule section and extending from the cavity gap to an opposing end of the ferrule section and a metal casing surrounding the ferrule section and the quartz substrate with an opening for said optical fiber extending therefrom. The pressure applied to the quartz substrate changes the dimensions of the cavity gap and a reflected signal from the reflective coating is processed as a pressure.
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