发明授权
- 专利标题: Fabricating method of thin film transistor array substrate
- 专利标题(中): 薄膜晶体管阵列基板的制造方法
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申请号: US12854914申请日: 2010-08-12
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公开(公告)号: US07968367B2公开(公告)日: 2011-06-28
- 发明人: Yao-Hong Chien , Chih-Chieh Wang , Xuan-Yu Liu , Li-Shan Chen
- 申请人: Yao-Hong Chien , Chih-Chieh Wang , Xuan-Yu Liu , Li-Shan Chen
- 申请人地址: TW Taoyuan
- 专利权人: Chunghwa Picture Tubes, Ltd.
- 当前专利权人: Chunghwa Picture Tubes, Ltd.
- 当前专利权人地址: TW Taoyuan
- 代理机构: Jianq Chyun IP Office
- 优先权: TW97124764A 20080701
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/84 ; H01L21/8238
摘要:
A fabricating method of a TFT array substrate includes following steps: providing a substrate having a pixel region and a bonding pad region surrounding the pixel region; forming a patterned polysilicon layer within the pixel region on the substrate; forming a first patterned insulating layer to cover the patterned polysilicon layer; forming a first patterned transparent conductive layer on the first patterned insulating layer; forming a first metal layer on the first patterned transparent conductive layer; forming a second patterned insulating layer to cover the first metal layer; forming a second patterned transparent conductive layer on the second patterned insulating layer; forming a second metal layer on the second patterned transparent conductive layer; forming a third patterned insulating layer to cover the second metal layer; and forming a third patterned transparent conductive layer on the third patterned insulating layer.
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