Invention Grant
- Patent Title: Transistor gate electrode having conductor material layer
- Patent Title (中): 具有导体材料层的晶体管栅电极
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Application No.: US12893983Application Date: 2010-09-29
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Publication No.: US07968957B2Publication Date: 2011-06-28
- Inventor: Anand Murthy , Boyan Boyanov , Suman Datta , Brian S. Doyle , Been-Yih Jin , Shaofeng Yu , Robert Chau
- Applicant: Anand Murthy , Boyan Boyanov , Suman Datta , Brian S. Doyle , Been-Yih Jin , Shaofeng Yu , Robert Chau
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Various embodiments of the invention relate to a PMOS device having a transistor channel of silicon germanium material on a substrate, a gate dielectric having a dielectric constant greater than that of silicon dioxide on the channel, a gate electrode conductor material having a work function in a range between a valence energy band edge and a conductor energy band edge for silicon on the gate dielectric, and a gate electrode semiconductor material on the gate electrode conductor material.
Public/Granted literature
- US20110018031A1 TRANSISTOR GATE ELECTRODE HAVING CONDUCTOR MATERIAL LAYER Public/Granted day:2011-01-27
Information query
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